Waveform design for pulse-and-hold electrostatic actuation in MEMS
Hartono Sumali, Jordan E. Massad, David A. Czaplewski, Christopher W. DyckVolume:
134
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2006.04.041
File:
PDF, 1.53 MB
english, 2007