Reactive ion etching for bulk structuring of polyimide

Sensors and Actuators A: Physical 2006 Vol. 132; Iss. 1

Reactive ion etching for bulk structuring of polyimide

U. Buder, J.-P. von Klitzing, E. Obermeier
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Volume:
132
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2006.04.048
File:
PDF, 1.03 MB
english, 2006
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