Support loss in the radial bulk-mode vibrations of...

Sensors and Actuators A: Physical 2007 Vol. 134; Iss. 2

Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Zhili Hao, Farrokh Ayazi
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Volume:
134
Year:
2007
Language:
english
Pages:
12
DOI:
10.1016/j.sna.2006.05.020
File:
PDF, 1.15 MB
english, 2007
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