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Amorphous metal alloy based MEMS for RF applications
Mari Ylönen, Tauno Vähä-Heikkilä, Hannu KattelusVolume:
132
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2006.05.033
File:
PDF, 901 KB
english, 2006