Effect of magnesium in KOH solution on the anisotropic wet...

Sensors and Actuators A: Physical 2007 Vol. 134; Iss. 2

Effect of magnesium in KOH solution on the anisotropic wet etching of silicon

Hiroshi Tanaka, Di Cheng, Mitsuhiro Shikida, Kazuo Sato
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Volume:
134
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2006.06.017
File:
PDF, 926 KB
english, 2007
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