Influence of metal stress on RF MEMS capacitive switches

Richard E. Strawser, Kevin D. Leedy, Rebecca Cortez, John L. Ebel, Steven R. Dooley, Cari F. Herrmann Abell, Victor M. Bright

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Volume:

134

Year:

2007

Language:

english

Pages:

DOI:

10.1016/j.sna.2006.06.024

File:

PDF, 438 KB

english, 2007

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