A high-performance silicon-on-insulator MEMS gyroscope...

Sensors and Actuators A: Physical 2007 Vol. 135; Iss. 1

A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure

Said Emre Alper, Kivanc Azgin, Tayfun Akin
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Volume:
135
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2006.06.043
File:
PDF, 1.90 MB
english, 2007
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