A low loss flexural plate wave (FPW) device through...

Sensors and Actuators A: Physical 2006 Vol. 132; Iss. 1

A low loss flexural plate wave (FPW) device through enhanced properties of sol–gel PZT (52/48) thin film and stable TiN-Pt bottom electrode

Praveen Kumar Sekhar, Sriram Akella, Shekhar Bhansali
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Volume:
132
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2006.07.020
File:
PDF, 1.41 MB
english, 2006
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