Characterization of Al2O3 thin films prepared by spray pyrolysis method for humidity sensor
K.S. Shamala, L.C.S. Murthy, M.C. Radhakrishna, K. Narasimha RaoVolume:
135
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2006.10.004
File:
PDF, 283 KB
english, 2007