Nonlinear dynamics of vibrating MEMS

Sensors and Actuators A: Physical 2007 Vol. 134; Iss. 1

Nonlinear dynamics of vibrating MEMS

Francesco Braghin, Ferruccio Resta, Elisabetta Leo, Guido Spinola
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Volume:
134
Year:
2007
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2006.10.041
File:
PDF, 2.39 MB
english, 2007
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