Seedlayer-less gold electroplating on silicon surface for...

Sensors and Actuators A: Physical 2007 Vol. 135; Iss. 1

Seedlayer-less gold electroplating on silicon surface for MEMS applications

Takayuki Fujita, Suguru Nakamichi, Sunao Ioku, Kazusuke Maenaka, Yoichiro Takayama
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Volume:
135
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2006.10.058
File:
PDF, 1.94 MB
english, 2007
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