A Computational Model for the Formation of (SiC)1-x(AIN)x...

Materials Science Forum 1998 Vol. 264-268

A Computational Model for the Formation of (SiC)1-x(AIN)x Structures by Hot, High-Dose N+ and Al+ Co-Implants in 6H-SiC

Truschin, Yu.V., Yankov, R.A., Kharlamov, V.S., Kulikov, D.V., Tsigankov, D.N., Kreissig, U., Voelskow, M., Pezoldt, Jörg, Skorupa, Wolfgang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.757
File:
PDF, 352 KB
1998
Conversion to is in progress
Conversion to is failed