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Optical characterization of silicon rich oxide films
A. Morales-Sánchez, J. Barreto, C. Domínguez-Horna, M. Aceves-Mijares, J.A. Luna-LópezVolume:
142
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.03.008
File:
PDF, 995 KB
english, 2008