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A new approach for MEMS power generation based on a piezoelectric diaphragm
Ingo Kuehne, Djordje Marinkovic, Gerald Eckstein, Helmut SeidelVolume:
142
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2007.04.031
File:
PDF, 1.18 MB
english, 2008