Diaphragm deflection control of piezoelectric ultrasonic...

Sensors and Actuators A: Physical 2007 Vol. 139; Iss. 1-2

Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement

Kaoru Yamashita, Hiroki Nishimoto, Masanori Okuyama
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Volume:
139
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2007.04.048
File:
PDF, 730 KB
english, 2007
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