GaAs based micromachined thermal converter for gas sensors

GaAs based micromachined thermal converter for gas sensors

T. Lalinský, M. Držík, J. Jakovenko, G. Vanko, Ž. Mozolová, Š. Haščík, J. Chlpík, I. Hotový, V. Řeháček, I. Kostič, L. Matay, M. Husák
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Volume:
142
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2007.05.014
File:
PDF, 696 KB
english, 2008
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