Novel Test Procedure of Tensile Test for MEMS Materials

Novel Test Procedure of Tensile Test for MEMS Materials

Park, Jun Hyub, Kim, Yun Jae, Myung, Man Sik, Lee, Chang Seung, Choa, Sung Hoon, Choi, Nam Sup
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Volume:
321-323
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.321-323.136
File:
PDF, 435 KB
english, 2006
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