Characterization and control of a pneumatic microactuator...

Sensors and Actuators A: Physical 2008 Vol. 141; Iss. 1

Characterization and control of a pneumatic microactuator with an integrated inductive position sensor

M. De Volder, J. Coosemans, R. Puers, D. Reynaerts
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Volume:
141
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2007.07.012
File:
PDF, 1.76 MB
english, 2008
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