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Development of fabrication process for integrated micro-optical elements on Si substrate
Junji Ohara, Kazuhiko Kano, Yukihiro TakeuchiVolume:
143
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.07.022
File:
PDF, 1.26 MB
english, 2008