Challenges of 4H-SiC MOSFETs on the C(000-1) Face toward...

Materials Science Forum 2009 Vol. 600-603

Challenges of 4H-SiC MOSFETs on the C(000-1) Face toward the Achievement of Ultra Low On-Resistance

Fukuda, Kenji, Harada, Shinsuke, Senzaki, Junji, Okamoto, Mitsuo, Tanaka, Yasunori, Kinoshita, Akimasa, Kosugi, Ryouji, Kojima, Kazu, Kato, Makoto, Shimozato, Atsushi, Suzuki, Kenji, Hayashi, Yusuke,
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.907
File:
PDF, 736 KB
english, 2009
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