Nonlinear behavior of SOI free-free micromechanical beam...

Sensors and Actuators A: Physical 2008 Vol. 142; Iss. 1

Nonlinear behavior of SOI free-free micromechanical beam resonator

Moorthi Palaniapan, Lynn Khine
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Volume:
142
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2007.08.016
File:
PDF, 1.20 MB
english, 2008
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