Monolithic SU-8 micro-interferometer for biochemical...

Sensors and Actuators A: Physical 2008 Vol. 141; Iss. 2

Monolithic SU-8 micro-interferometer for biochemical detections

B.Y. Shew, Y.C. Cheng, Y.H. Tsai
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Volume:
141
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2007.08.029
File:
PDF, 784 KB
english, 2008
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