Mechanical calibration of MEMS springs with...

Sensors and Actuators A: Physical 2008 Vol. 143; Iss. 1

Mechanical calibration of MEMS springs with sub-micro-Newton force resolution

Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya
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Volume:
143
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.10.042
File:
PDF, 1.07 MB
english, 2008
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