Novel monocrystalline silicon micromirrors for maskless...

Novel monocrystalline silicon micromirrors for maskless lithography

M. Bring, P. Enoksson
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Volume:
145-146
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2007.10.050
File:
PDF, 1023 KB
english, 2008
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