Cathodic corrosion of polycrystalline silicon MEMS

Sensors and Actuators A: Physical 2008 Vol. 145-146; Iss. none

Cathodic corrosion of polycrystalline silicon MEMS

Melitta Hon, Frank W. DelRio, John T. White, Martin Kendig, Carlo Carraro, Roya Maboudian
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Volume:
145-146
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2007.12.006
File:
PDF, 938 KB
english, 2008
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