A passive gap-spacing control scheme for in-plane...

Sensors and Actuators A: Physical 2008 Vol. 145-146; Iss. none

A passive gap-spacing control scheme for in-plane nano-precision sensing and positioning applications

Narayanan Ramakrishnan, Patrick B. Chu, Earl C. Johns, Yongjun Zhao, Xiaoping Yan
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Volume:
145-146
Year:
2008
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2007.12.009
File:
PDF, 1.56 MB
english, 2008
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