Multilayered LiNbO3 actuator for XY-stage using a shear...

Sensors and Actuators A: Physical 2008 Vol. 144; Iss. 2

Multilayered LiNbO3 actuator for XY-stage using a shear piezoelectric effect

Go Matsunami, Akito Kawamata, Hiroshi Hosaka, Takeshi Morita
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Volume:
144
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.sna.2008.02.006
File:
PDF, 836 KB
english, 2008
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