Reduction of surface roughness of a silicon chip for...

Sensors and Actuators A: Physical 2008 Vol. 144; Iss. 2

Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Luigi La Spina, Denis Ovchinnikov, Wim H.A. Wien, Alexander W. van Herwaarden, Egbert J.G. Goudena, Joachim Loos, Lis K. Nanver
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
144
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2008.02.010
File:
PDF, 1.22 MB
english, 2008
Conversion to is in progress
Conversion to is failed