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Studies and optimization of the frequency response of a micromachined thermal accelerometer
J. Courteaud, N. Crespy, P. Combette, B. Sorli, A. GianiVolume:
147
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2008.03.015
File:
PDF, 2.65 MB
english, 2008