Etching and Surface Modification of Polyimide in O2 -SF6...

MRS Proceedings 1986 / 1 Vol. 68

Etching and Surface Modification of Polyimide in O2 -SF6 Plasmas

Kogoma, M., Turban, G.
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Volume:
68
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-68-401
Date:
January, 1986
File:
PDF, 262 KB
english, 1986
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