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A SOI-MEMS-based 3-DOF planar parallel-kinematics nanopositioning stage
Deepkishore Mukhopadhyay, Jingyan Dong, Eakkachai Pengwang, Placid FerreiraVolume:
147
Year:
2008
Language:
english
Pages:
12
DOI:
10.1016/j.sna.2008.04.018
File:
PDF, 1.48 MB
english, 2008