Investigation of the Thermal Stability of Strained Ge Layers Grown at Low Temperature by Reduced-pressure Chemical Vapour Deposition on Si0.2Ge0.8 Relaxed Buffers
Dobbie, Andy, Myronov, Maksym, Liu, Xue-Chao, Nguyen, Van Huy, Parker, Evan, Leadley, DavidVolume:
1252
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1252-I04-06
Date:
January, 2010
File:
PDF, 416 KB
english, 2010