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Simulation, fabrication and characterization of a 3D piezoresistive force sensor
A. Tibrewala, A. Phataralaoha, S. BüttgenbachVolume:
147
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2008.05.020
File:
PDF, 1.08 MB
english, 2008