Low Stress MEMS Delay Mechanism

Low Stress MEMS Delay Mechanism

Li, Guo Zhong, Shi, Geng Chen, Sui, Li
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Volume:
562-565
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.562-565.1489
Date:
July, 2013
File:
PDF, 464 KB
english, 2013
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