Low Stress MEMS Delay Mechanism
Li, Guo Zhong, Shi, Geng Chen, Sui, LiVolume:
562-565
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.562-565.1489
Date:
July, 2013
File:
PDF, 464 KB
english, 2013