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Design, fabrication and characterization of an externally actuated ON/OFF microvalve
J. Casals-Terré, M. Duch, J.A. Plaza, J. Esteve, R. Pérez-Castillejos, E. Vallés, E. GómezVolume:
147
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2008.06.022
File:
PDF, 1.21 MB
english, 2008