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Microhotplates with TiN heaters
J.F. Creemer, D. Briand, H.W. Zandbergen, W. van der Vlist, C.R. de Boer, N.F. de Rooij, P.M. SarroVolume:
148
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2008.08.016
File:
PDF, 1.07 MB
english, 2008