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Large angle SOI tilting actuator with integrated motion transformer and amplifier
A. Ya’akobovitz, S. Krylov, Y. Shacham-DiamandVolume:
148
Year:
2008
Language:
english
Pages:
15
DOI:
10.1016/j.sna.2008.08.020
File:
PDF, 1.85 MB
english, 2008