3C-SiC Films on Si for MEMS Applications: Mechanical...

Materials Science Forum 2009 Vol. 615-617

3C-SiC Films on Si for MEMS Applications: Mechanical Properties

Locke, Christopher, Kravchenko, G., Waters, P., Reddy, J. D., Du, K., Volinsky, A.A., Frewin, Christopher L., Saddow, Stephen E.
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Volume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.633
File:
PDF, 266 KB
english, 2009
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