Design and demonstration of PECVD multilayer dielectric...

Sensors and Actuators A: Physical 2009 Vol. 155; Iss. 1

Design and demonstration of PECVD multilayer dielectric mirrors optimized for micromachined cavity angled sidewalls

Maximillian A. Perez, John Kitching, Andrei M. Shkel
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Volume:
155
Year:
2009
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2008.10.007
File:
PDF, 2.53 MB
english, 2009
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