Development of a wide-tuning range and high Q variable...

Sensors and Actuators A: Physical 2009 Vol. 149; Iss. 2

Development of a wide-tuning range and high Q variable capacitor using metal-based surface micromachining process

I.-Yu Huang, Chian-Hao Sun, Han-Cheng Tasi, Che-Ya Chou, Chih-Sheng Huang
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Volume:
149
Year:
2009
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2008.11.009
File:
PDF, 1.56 MB
english, 2009
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