Mechanical design and fabrication of multi-layer indium...

Sensors and Actuators A: Physical 2009 Vol. 150; Iss. 1

Mechanical design and fabrication of multi-layer indium phosphide freestanding microstructures for a MOEMS microspectrometer

R. Gil-Sobraques, M. Garrigues, J.-L. Leclercq, O. Parillaud
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Volume:
150
Year:
2009
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2008.11.028
File:
PDF, 1.16 MB
english, 2009
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