A MEMS-based resonant-scanning lamellar grating Fourier...

Sensors and Actuators A: Physical 2009 Vol. 149; Iss. 2

A MEMS-based resonant-scanning lamellar grating Fourier transform micro-spectrometer with laser reference system

Feiwen Lee, Guangya Zhou, Hongbin Yu, Fook Siong Chau
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Volume:
149
Year:
2009
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2008.12.002
File:
PDF, 1.54 MB
english, 2009
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