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Highly sensitive strained AlN on Si(1 1 1) resonators
M. Placidi, J.C. Moreno, P. Godignon, N. Mestres, E. Frayssinet, F. Semond, C. SerreVolume:
150
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2008.12.005
File:
PDF, 414 KB
english, 2009