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Study of symmetric microstructures for CMOS multilayer residual stress
Ying-Jui Huang, Tien-Li Chang, Hwai-Pwu ChouVolume:
150
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2009.01.012
File:
PDF, 1.34 MB
english, 2009