Optimal design of Al/Si bimorph electro-thermal...

Sensors and Actuators A: Physical 2009 Vol. 151; Iss. 1

Optimal design of Al/Si bimorph electro-thermal microactuator by integrating finite-element code with optimization method

Chin-Hsiang Cheng, Chi-Kang Chan, Guang-Jer Lai
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Volume:
151
Year:
2009
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2009.01.013
File:
PDF, 2.13 MB
english, 2009
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