The Influence of Total and Oxygen Partial Pressures on Structure and Hydrophilic Property of TiO2 Thin Films Deposited by Reactive DC Magnetron Sputtering
Chaiyakun, S., Buranawong, A., Deelert, T., Witit-anun, N.Volume:
55-57
Year:
2008
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.55-57.465
File:
PDF, 628 KB
english, 2008