![](/img/cover-not-exists.png)
High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics
T. Zoumpoulidis, M. Bartek, P. de Graaf, R. DekkerVolume:
156
Year:
2009
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2009.03.030
File:
PDF, 1.64 MB
english, 2009