Design of MEMS vertical–horizontal chevron thermal...

Sensors and Actuators A: Physical 2009 Vol. 153; Iss. 1

Design of MEMS vertical–horizontal chevron thermal actuators

Jorge Varona, Margarita Tecpoyotl-Torres, Anas A. Hamoui
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Volume:
153
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.sna.2009.04.027
File:
PDF, 396 KB
english, 2009
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