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Post processing of microstructures by PDMS spray deposition

Post processing of microstructures by PDMS spray deposition

K. Choonee, R.R.A. Syms, M.M. Ahmad, H. Zou
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Volume:
155
Year:
2009
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2009.08.029
File:
PDF, 1.44 MB
english, 2009
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