A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry
Yi-Ting Yu, Wei-Zheng Yuan, Da-Yong Qiao, Bin YanVolume:
158
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2009.12.032
File:
PDF, 1.43 MB
english, 2010